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NEN EN ISO 14644-1 : 2016

Current

Current

The latest, up-to-date edition.

CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 1: CLASSIFICATION OF AIR CLEANLINESS BY PARTICLE CONCENTRATION

Published date

12-01-2013

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Foreword
Introduction
1 Scope
2 Definitions
3 Classification
4 Demonstration of compliance
Annexes A (informative) Graphical illustration of the classes
                        of Table 1
Annexes B (normative) Determination of particulate
                      cleanliness classification using a
                      discrete-particle-counting,
                      light-scattering instrument
Annexes C (normative) Statistical treatment of particle
                      concentration data
Annexes D (informative) Worked examples of classification
                        calculations
Annexes E (informative) Considerations for the counting and
                        sizing of particles outside the size
                        range applicable for classification
Annexes F (informative) Sequential sampling procedure
Bibliography
Figures
A.1 - Graphical representation of ISO-class concentration
      limits for selected ISO classes
F.1 - Boundaries for pass or fail by the sequential
      sampling procedure
Tables
1 - Selected airborne particulate cleanliness classes for
      cleanrooms and clean zones
C.1 - Student's t distribution for the 95% upper confidence
      limit
F.1 - Upper and lower limits for time at which C observed
      counts should arrive

Defines the classification of air cleanliness in terms of concentration of airborne particles in cleanrooms and clean zones; and separative devices as defined in ISO 14644-7.

DocumentType
Standard
PublisherName
Netherlands Standards
Status
Current

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