Foreword
Introduction
1 Scope
2 Definitions
3 Classification
4 Demonstration of compliance
Annexes A (informative) Graphical illustration of the classes
of Table 1
Annexes B (normative) Determination of particulate
cleanliness classification using a
discrete-particle-counting,
light-scattering instrument
Annexes C (normative) Statistical treatment of particle
concentration data
Annexes D (informative) Worked examples of classification
calculations
Annexes E (informative) Considerations for the counting and
sizing of particles outside the size
range applicable for classification
Annexes F (informative) Sequential sampling procedure
Bibliography
Figures
A.1 - Graphical representation of ISO-class concentration
limits for selected ISO classes
F.1 - Boundaries for pass or fail by the sequential
sampling procedure
Tables
1 - Selected airborne particulate cleanliness classes for
cleanrooms and clean zones
C.1 - Student's t distribution for the 95% upper confidence
limit
F.1 - Upper and lower limits for time at which C observed
counts should arrive