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NEN IEC 62047-30 : 2017

Current

Current

The latest, up-to-date edition.

SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 30: MEASUREMENT METHODS OF ELECTRO-MECHANICAL CONVERSION CHARACTERISTICS OF MEMS PIEZOELECTRIC THIN FILM

Published date

18-10-2017

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Describes measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices.

DocumentType
Standard
PublisherName
Netherlands Standards
Status
Current

Standards Relationship
IEC 62047-30:2017 Identical

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