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NEN-IEC 62047-31:2019

Current

Current

The latest, up-to-date edition.

Semiconductor devices - Micro-electromechanical devices - Part 31: Four-point bending test method for interfacial adhesion energy of layered MEMS materials

Available format(s)

Hardcopy

Language(s)

English

Published date

01-04-2019

€77.16
Excluding VAT

NEN-IEC 62047-31 specifies a four-point bending test method for measuring interfacial adhesion energy of the weakest interface in the layered micro-electromechanical systems (MEMS) based on the concept of fracture mechanics.

DocumentType
Standard
ISBN
9782832267172
Pages
0
PublisherName
Netherlands Standards
Status
Current

Standards Relationship
IEC 62047-31:2019 Identical

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€77.16
Excluding VAT