NEN-ISO 11952 : 2019
Current
Current
The latest, up-to-date edition.
Surface chemical analysis - Scanning-probe microscopy - Determination of geometric quantities using SPM: Calibration of measuring systems
Published date
01-06-2019
Publisher
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NEN-ISO 11952 specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes (SPMs) for measuring geometric quantities at the highest level.
| Committee |
TC 201
|
| DocumentType |
Standard
|
| PublisherName |
Netherlands Standards
|
| Status |
Current
|
| Standards | Relationship |
| ISO 11952:2019 | Identical |
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