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NEN ISO 14701 : 2011

Current

Current

The latest, up-to-date edition.

SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - MEASUREMENT OF SILICON OXIDE THICKNESS

Published date

12-01-2013

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Defines several methods for measuring the oxide thickness at the surfaces of (100) and (111) silicon wafers as an equivalent thickness of silicon dioxide when measured using X-ray photoelectron spectroscopy.

DocumentType
Standard
PublisherName
Netherlands Standards
Status
Current

Standards Relationship
ISO 14701:2011 Identical

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