• Shopping Cart
    There are no items in your cart

NEN ISO 14701 : 2011

Current

Current

The latest, up-to-date edition.

SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - MEASUREMENT OF SILICON OXIDE THICKNESS

Published date

12-01-2013

Sorry this product is not available in your region.

Defines several methods for measuring the oxide thickness at the surfaces of (100) and (111) silicon wafers as an equivalent thickness of silicon dioxide when measured using X-ray photoelectron spectroscopy.

DocumentType
Standard
PublisherName
Netherlands Standards
Status
Current

Standards Relationship
ISO 14701:2011 Identical

Access your standards online with a subscription

Features

  • Simple online access to standards, technical information and regulations.

  • Critical updates of standards and customisable alerts and notifications.

  • Multi-user online standards collection: secure, flexible and cost effective.