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NEN-ISO 16413:2020

Current

Current

The latest, up-to-date edition.

Evaluation of thickness, density and interface width of thin films by X-ray reflectometry - Instrumental requirements, alignment and positioning, data collection, data analysis and reporting

Available format(s)

Hardcopy

Language(s)

English

Published date

01-09-2020

€166.28
Excluding VAT

NEN-ISO 16413 specifies a method for the evaluation of thickness, density and interface width of single layer and multi-layered thin films which have thicknesses between approximately 1 nm and 1 μm,on flat substrates, by means of X-Ray Reflectometry (XRR).

Committee
TC 201
DocumentType
Standard
Pages
0
PublisherName
Netherlands Standards
Status
Current
Supersedes

Standards Relationship
ISO 16413:2020 Identical

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