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NEN ISO 18114 : 2003

Current

Current

The latest, up-to-date edition.

SURFACE CHEMICAL ANALYSIS - SECONDARY-ION MASS SPECTROMETRY - DETERMINATION OF RELATIVE SENSITIVITY FACTORS FROM ION-IMPLANTED REFERENCE MATERIALS

Published date

12-01-2013

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Defines a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials. Applies to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.

DocumentType
Standard
PublisherName
Netherlands Standards
Status
Current

Standards Relationship
ISO 18114:2003 Identical

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