NEN ISO 18114 : 2003
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The latest, up-to-date edition.
SURFACE CHEMICAL ANALYSIS - SECONDARY-ION MASS SPECTROMETRY - DETERMINATION OF RELATIVE SENSITIVITY FACTORS FROM ION-IMPLANTED REFERENCE MATERIALS
Published date
12-01-2013
Publisher
Defines a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials. Applies to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.
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