NEN ISO 20341 : 2003
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The latest, up-to-date edition.
SURFACE CHEMICAL ANALYSIS - SECONDARY-ION MASS SPECTROMETRY - METHOD FOR ESTIMATING DEPTH RESOLUTION PARAMETERS WITH MULTIPLE DELTA-LAYER REFERENCE MATERIALS
Published date
12-01-2013
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Defines procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials.
| DocumentType |
Standard
|
| PublisherName |
Netherlands Standards
|
| Status |
Current
|
| Standards | Relationship |
| ISO 20341:2003 | Identical |
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