NEN ISO 4 : 2003
Current
Current
The latest, up-to-date edition.
MEASUREMENT OF THERMAL CONDUCTIVITY OF THIN FILMS ON SILICON SUBSTRATES
Published date
12-01-2013
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Specifies a standard procedure for the three-omega method proposed for measuring the thermal conductivity of a thin, electrically insulating film, on a substrate having a thermal conductivity significantly greater than the thermal conductivity of the film.
| DocumentType |
Standard
|
| PublisherName |
Netherlands Standards
|
| Status |
Current
|
| Standards | Relationship |
| ISO 4:1997 | Identical |
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