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NEN ISO 5302 : 2003

Current

Current

The latest, up-to-date edition.

VACUUM TECHNOLOGY - TURBOMOLECULAR PUMPS - MEASUREMENT OF PERFORMANCE CHARACTERISTICS

Published date

12-01-2013

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Defines methods for the measurement of performance characteristics of turbomolecular pumps. Applies to all sizes and all types of turbomolecular pumps with mechanical or magnetic bearings, and with or without an additional drag stage.

DocumentType
Standard
PublisherName
Netherlands Standards
Status
Current

Standards Relationship
ISO 5302:2003 Identical

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