NEN ISO 5302 : 2003
Current
Current
The latest, up-to-date edition.
VACUUM TECHNOLOGY - TURBOMOLECULAR PUMPS - MEASUREMENT OF PERFORMANCE CHARACTERISTICS
Published date
12-01-2013
Publisher
Defines methods for the measurement of performance characteristics of turbomolecular pumps. Applies to all sizes and all types of turbomolecular pumps with mechanical or magnetic bearings, and with or without an additional drag stage.
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