NF EN 62047-11 : 2014
Current
Current
The latest, up-to-date edition.
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 11: TEST METHOD FOR COEFFICIENTS OF LINEAR THERMAL EXPANSION OF FREE-STANDING MATERIALS FOR MICRO-ELECTROMECHANICAL SYSTEMS
Published date
12-01-2013
Publisher
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| DevelopmentNote |
Indice de classement: C96-050-11. PR NF EN 62047-11 May 2012. (05/2012)
|
| DocumentType |
Standard
|
| PublisherName |
Association Francaise de Normalisation
|
| Status |
Current
|
| Standards | Relationship |
| EN 62047-11 : 2013 | Identical |
| IEC 62047-11:2013 | Identical |
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