NF EN 62047-18 : 2014
Current
Current
The latest, up-to-date edition.
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 18: BEND TESTING METHODS OF THIN FILM MATERIALS
Published date
12-01-2013
Publisher
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| DevelopmentNote |
Indice de classement: C96-050-18. PR NF EN 62047-18 July 2012. (07/2012)
|
| DocumentType |
Standard
|
| PublisherName |
Association Francaise de Normalisation
|
| Status |
Current
|
| Standards | Relationship |
| EN 62047-18:2013 | Identical |
| IEC 62047-18:2013 | Identical |
| IEC 62047-6:2009 | Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials |
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