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NF EN 62047-18 : 2014

Current

Current

The latest, up-to-date edition.

SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 18: BEND TESTING METHODS OF THIN FILM MATERIALS

Published date

12-01-2013

DevelopmentNote
Indice de classement: C96-050-18. PR NF EN 62047-18 July 2012. (07/2012)
DocumentType
Standard
PublisherName
Association Francaise de Normalisation
Status
Current

Standards Relationship
EN 62047-18:2013 Identical
IEC 62047-18:2013 Identical

IEC 62047-6:2009 Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials

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