NF EN 62047-21 : 2014
Current
Current
The latest, up-to-date edition.
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 21: TEST METHOD FOR POISSON'S RATIO OF THIN FILM MEMS MATERIALS
Published date
11-07-2013
Publisher
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| DevelopmentNote |
Indice de classement: C96-050-21. PR NF EN 62047-21 June 2013. (07/2013)
|
| DocumentType |
Standard
|
| PublisherName |
Association Francaise de Normalisation
|
| Status |
Current
|
| Standards | Relationship |
| EN 62047-21:2014 | Identical |
| IEC 62047-21:2014 | Identical |
| IEC 62047-8:2011 | Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for tensile property measurement of thin films |
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