NF EN ISO 14644-8:2022
Current
The latest, up-to-date edition.
Cleanrooms and associated controlled environments - Part 8 : assessment of air cleanliness by chemical concentration (ACC)
Hardcopy
French, English
01-07-2022
This document establishes typical assessment processes to determine grading levels of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category), and provides a protocol to include test methods, analysis and time-weighted factors for their determination.
Committee |
ISO/TC 209
|
DocumentType |
Standard
|
Pages |
36
|
PublisherName |
Association Francaise de Normalisation
|
Status |
Current
|
Supersedes |
Standards | Relationship |
EN ISO 14644-8:2022 | Identical |
ISO 14644-8:2022 | Identical |
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