NF EN ISO 14644-9:2022
Current
Current
The latest, up-to-date edition.
Cleanrooms and associated controlled environments - Part 9: Assessment ofsurfacecleanliness for particleconcentration
Available format(s)
Hardcopy
Language(s)
English - French
Published date
01-05-2022
Publisher
This document establishes a procedure for the assessment of particle cleanliness levels onsolid surfacesin cleanrooms and associated controlled environment applications.
Committee |
ISO/TC 209
|
DocumentType |
Standard
|
Pages |
42
|
PublisherName |
Association Francaise de Normalisation
|
Status |
Current
|
Supersedes |
Standards | Relationship |
ISO 14644-9:2022 | Identical |
EN ISO 14644-9:2022 | Identical |
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