NF EN ISO 14644-9:2022
Current
Current
The latest, up-to-date edition.
Cleanrooms and associated controlled environments - Part 9: Assessment ofsurfacecleanliness for particleconcentration
Published date
01-05-2022
Publisher
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This document establishes a procedure for the assessment of particle cleanliness levels onsolid surfacesin cleanrooms and associated controlled environment applications.
| Committee |
ISO/TC 209
|
| DocumentType |
Standard
|
| PublisherName |
Association Francaise de Normalisation
|
| Status |
Current
|
| Supersedes |
| Standards | Relationship |
| ISO 14644-9:2022 | Identical |
| EN ISO 14644-9:2022 | Identical |
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