Vacuum technology. Vacuum gauges. Characterization of quadrupole mass spectrometers for partial pressure measurement

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

08-05-2018

Publisher

British Standards Institution

Committee	MCE/8/-/4
DocumentType	Standard
Pages	32
PublisherName	British Standards Institution
Status	Current

This document describes procedures to characterize quadrupole mass spectrometers (QMSs) with an ion source of electron impact ionization and which are designed for the measurement of atomic mass-to-charge ratios m/z

Standards	Relationship
ISO/TS 20175:2018	Identical

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PD ISO/TS 20175:2018

Vacuum technology. Vacuum gauges. Characterization of quadrupole mass spectrometers for partial pressure measurement

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Scope

International Equivalents

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Subcategory