PN EN 62047-14 : 2012
Current
Current
The latest, up-to-date edition.
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 14: FORMING LIMIT MEASURING METHOD OF METALLIC FILM MATERIALS
Published date
12-01-2013
Publisher
Specifies definitions and procedures for measuring the forming limit of metallic film materials with a thickness range from 0,5 micrometer to 300 micrometers.
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