PN EN 62047-8 : 2011
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SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 8: STRIP BENDING TEST METHOD FOR TENSILE PROPERTY MEASUREMENT OF THIN FILMS
Published date
12-01-2013
Publisher
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Describes the strip bending test method to measure tensile properties of thin films with high accuracy, repeatability, moderate effort of alignment and specimen handling compared to the conventional tensile test.
| Committee |
TC 60
|
| DocumentType |
Standard
|
| PublisherName |
Polish Committee for Standardization
|
| Status |
Current
|
| Standards | Relationship |
| IEC 62047-8:2011 | Identical |
| EN 62047-8:2011 | Identical |
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