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CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 9: CLASSIFICATION OF SURFACE CLEANLINESS BY PARTICLE CONCENTRATION (ISO 14644-9:2012)
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Superseded date: 05-11-2022
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Published date: 09-11-2012
Publisher: Polish Committee for Standardization
Specifies the classification of the particle contamination levels on solid surfaces in clean rooms and associated controlled environment applications.
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