PNE-FprEN 62047-17
Current
Current
The latest, up-to-date edition.
Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films
Published date
21-07-2015
Publisher
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Committee |
CTN 209/SC 47
|
DocumentType |
Standard
|
PublisherName |
Asociacion Espanola de Normalizacion
|
Status |
Current
|
Standards | Relationship |
IEC 62047-17:2015 | Identical |
EN 62047-17:2015 | Identical |
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