PNE-FprEN 62047-26
Current
Current
The latest, up-to-date edition.
Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures
Published date
10-05-2016
Publisher
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| Committee |
CTN 209/SC 47
|
| DocumentType |
Standard
|
| PublisherName |
Asociacion Espanola de Normalizacion
|
| Status |
Current
|
| Standards | Relationship |
| IEC 62047-26:2016 | Identical |
| EN 62047-26:2016 | Identical |
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