PREN ISO 14644-10 : DRAFT 2011
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 10: CLASSIFICATION OF SURFACE CHEMICAL CLEANLINESS BY CHEMICAL CONCENTRATION
01-03-2013
12-01-2013
Foreword
1 Scope
2 Normative references
3 Terms and definitions
4 Classification
5 Measuring and monitoring the cleanliness of surfaces
for chemical contamination and demonstration of
compliance
6 Test record
Annex A (informative) - Conversion between different
unit expressions of surface concentration
for chemical substances
Annex B (informative) - Parameters influencing testing
and interpretation of results
Annex C (informative) - Essential considerations for a
good cleanliness assessment
Annex D (informative) - Methods for testing surface
cleanliness by chemical concentration
Bibliography
Describes the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles).
| Committee |
TC 243
|
| DocumentType |
Draft
|
| PublisherName |
Comite Europeen de Normalisation
|
| Status |
Superseded
|
| Standards | Relationship |
| DIN EN ISO 14644-10:2013-06 | Identical |
| 11/30196563 DC : 0 | Identical |
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