PREN ISO 14644-8 : DRAFT 2011

Superseded

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CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 8: CLASSIFICATION OF AIR CLEANLINESS BY CHEMICAL CONCENTRATION (ISO/DIS 14644-8:2011)

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Superseded date: 01-02-2013

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Published date: 12-01-2013

Publisher: Comite Europeen de Normalisation

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Table of Contents - (Show below) - (Hide below)

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Classification
5 Demonstration of compliance
Annex A (informative) - Parameters for consideration
Annex B (informative) - Typical contaminants
Annex C (informative) - Typical methods of measurement
Annex D (informative) - Consideration of specific
requirements for separative devices
Bibliography

Abstract - (Show below) - (Hide below)

Includes the classification of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category) and provides a protocol to include test methods, analysis and time-weighted factors within the specification for classification.

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Comment Closes On
Committee	TC 243
Document Type	Draft
ISBN
Pages
Published
Publisher	Comite Europeen de Normalisation
Status	Superseded
Superseded By	EN ISO 14644-8:2013

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Equivalent Standard(s)	Relationship
11/30248115 DC : 0	Identical

Standards Referenced By This Book - (Show below) - (Hide below)

VDI 2083 Blatt 9.1:2006-12	Clean room technology - Compatibility with required cleanliness and surface cleanliness
VDI 2083 Blatt 3:2005-07	Cleanroom technology - Metrology and test methods

Standards Referencing This Book - (Show below) - (Hide below)

SEMI E45 : NOV 2001(R2007)	TEST METHOD FOR THE DETERMINATION OF INORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING VAPOR PHASE DECOMPOSITION-TOTAL REFLECTION X-RAY SPECTROSCOPY (VPD-TXRF) AND VAPOR PHASE DECOMPOSITION-ATOMIC ABSORPTION SPECTROSCOPY (VPD/ICP-MS)
SEMI E46 : 2007	TEST METHOD FOR THE DETERMINATION OF ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING ION MOBILITY SPECTROMETRY (IMS)
ISO 14644-6:2007	Cleanrooms and associated controlled environments Part 6: Vocabulary
ISO 14644-5:2004	Cleanrooms and associated controlled environments — Part 5: Operations
ISO 14644-7:2004	Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
IEST G CC035.1 : 2009	DESIGN CONSIDERATIONS FOR AIRBORNE MOLECULAR CONTAMINATION FILTRATION SYSTEMS IN CLEANROOMS AND OTHER CONTROLLED ENVIRONMENTS
ISO 14644-4:2001	Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up
SEMI F21 : 2016	CLASSIFICATION OF AIRBORNE MOLECULAR CONTAMINANT LEVELS IN CLEAN ENVIRONMENTS
SEMI E108 : 2007	TEST METHOD FOR THE ASSESSMENT OF OUTGASSING ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING GAS CHROMATOGRAPHY/MASS SPECTROSCOPY

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