PREN ISO 14644-9 : DRAFT 2008
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 9: CLASSIFICATION OF SURFACE PARTICLE CLEANLINESS
01-08-2012
12-01-2013
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Abbreviated terms
5 Classification system
6 Demonstration of compliance
Annex A (informative) - Descriptor for specific particle
size ranges
Annex B (informative) - Parameters influencing the SPC
classification
Annex C (informative) - Surface characteristics
Annex D (informative) - Measurement methods for testing
surface particle cleanliness
Bibliography
Specifies the classification of the particle contamination levels on solid surfaces in cleanrooms and associated controlled environment applications.
| Committee |
TC 243
|
| DocumentType |
Draft
|
| PublisherName |
Comite Europeen de Normalisation
|
| Status |
Superseded
|
| Standards | Relationship |
| DIN EN ISO 14644-9:2012-12 | Identical |
| VDI 2083 Blatt 18:2012-01 | Cleanroom technology - Biocontamination control |
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