PREN ISO 25178-606 : DRAFT 2013
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
GEOMETRICAL PRODUCT SPECIFICATION (GPS) - SURFACE TEXTURE: AREAL - PART 606: NOMINAL CHARACTERISTICS OF NON-CONTACT (FOCUS VARIATION) INSTRUMENTS (ISO/DIS 25178-606:2013)
Superseded date
01-06-2015
Published date
07-02-2013
Publisher
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Description of the influence quantities
Annex A (normative) - Components of a Focus Variation
Microscope
Annex B (informative) - Relation to the GPS matrix model
Bibliography
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