SAC GB/T 16596:2019
Current
Current
The latest, up-to-date edition.
Specification for establishing a wafer coordinate system
Available format(s)
Hardcopy , PDF
Language(s)
Chinese
Published date
25-03-2019
Publisher
| Committee |
TC 203
|
| DocumentType |
Standard
|
| Pages |
0
|
| ProductNote |
THIS STANDARD ALSO REFERS TO SAC BG/T 34479, SAC YS/T 986,
|
| PublisherName |
Standardization Administration of China
|
| Status |
Current
|
| Supersedes |
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