SAC GB/T 16879 : 1997
Current
Current
The latest, up-to-date edition.
GUIDELINES FOR PRECISION AND ACCURACY EXPRESSION FOR MASK WRITING EQUIPMENT
Available format(s)
Hardcopy , PDF
Language(s)
English
Published date
01-01-1997
Publisher
| DocumentType |
Standard
|
| Pages |
12
|
| PublisherName |
Standardization Administration of China
|
| Status |
Current
|
| Standards | Relationship |
| SEMI P21 : 1992(R2003) | Identical |
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