SEMI 3D15 : 2016
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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GUIDE FOR OVERLAY PERFORMANCE ASSESSMENT FOR 3DS-IC PROCESS
Published date
04-04-2016
Superseded date
07-12-2022
Superseded by
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Specifies a generic optical measurement methodology and linear dimensional parameters such as translation, expansion, rotation, residue errors and vector plots for overlay performance assessment in 3D-IC middle end process quality control.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (03/2016)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
| SEMI P28 : 1996(R2007) | SPECIFICATION FOR OVERLAY-METROLOGY TEST PATTERNS FOR INTEGRATED-CIRCUIT MANUFACTURE |
| SEMI P18 : 1992(R2004) | SPECIFICATION FOR OVERLAY CAPABILITIES OF WAFER STEPPERS |
| SEMI 3D7 : 2013(R2019) | GUIDE FOR ALIGNMENT MARK FOR 3DS-IC PROCESS |
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