SEMI A1 : 2017
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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SPECIFICATION FOR HORIZONTAL COMMUNICATION (HC) BETWEEN EQUIPMENT FOR FACTORY AUTOMATION SYSTEM
08-02-2021
04-07-2017
Gives a specification for communication between adjacent equipment in material flow (hereinafter referred to as horizontal communication [HC]) to be used for Factory Automation system (equipment here includes process equipment, metrology equipment, transport equipment and clustered one of those, etc.).
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Supersedes SEMI PV35. Includes SEMI A1.1. (06/2017)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| Supersedes |
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