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SEMI A1 : 2017

SEMI A1 : 2017

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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SPECIFICATION FOR HORIZONTAL COMMUNICATION (HC) BETWEEN EQUIPMENT FOR FACTORY AUTOMATION SYSTEM

Superseded date

08-02-2021

Published date

04-07-2017

Publisher

Semiconductor Equipment & Materials Institute

Gives a specification for communication between adjacent equipment in material flow (hereinafter referred to as horizontal communication [HC]) to be used for Factory Automation system (equipment here includes process equipment, metrology equipment, transport equipment and clustered one of those, etc.).

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. Supersedes SEMI PV35. Includes SEMI A1.1. (06/2017)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy
Supersedes

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