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SEMI C1.1 : 1996

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by

STANDARD FOR ACETIC ACID

Superseded date

01-03-2001

Superseded by

SEMI C18 : 2014

Published date

12-01-2013

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Intended to establish the general procedures, specifications, definitions, and analytical procedures for acetic acid. Products within all of the requirements can be described as "meeting SEMI specifications." Where analytical procedure differs from that provided and is substituted by a user or supplier, the burden of proof is on said user or supplier to confirm the equivalency.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (02/2005)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

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