SEMI C1.23 : 1994
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
STANDARD FOR HEXAMETHYLDISILAZANE (HMDS)
01-04-2000
12-01-2013
Specific to Hexamethyldisilazane (HMDS). Suppliers recognizing the importance of impurity content of chemicals in the manufacture of semiconductors, responded by introducing products with improved analytical characterization, notably for trace elements. Products within all of the requirements can be described as "meeting SEMI specification." Where analytical procedure differs from that provided and is substituted by a user or supplier, the burden of proof is on said user or supplier to confirm the equivalency. The Process Chemicals Committee is continuing work on improvement of procedures and specifications and addition of other reagents and systems such as mixed etchants. The Committee welcomes suggestions, comments, and recommendations.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (02/2005)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
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