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SEMI C1-5 : 1996

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by

STANDARD FOR N-BUTYL ACETATE

Superseded date

01-03-2001

Superseded by

SEMI C24 : 2013

Published date

12-01-2013

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Intended to establish the general procedures, specifications, definitions, and analytical procedures for n-butyl acetate. Products within all of the requirements can be described as "meeting SEMI specifications". Where analytical procedure differs from that provided and is substituted by a user or supplier, the burden of proof is on said user of supplier to confirm the equivalency.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (02/2005)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

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