SEMI C11-2 : 1994
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
GUIDELINE FOR AMMONIUM FLUORIDE SOLUTION, VLSI GRADE
Superseded date
01-11-2001
Superseded by
Published date
12-01-2013
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Reflects a chemical purity level between the currently published specification SEMI C1.3 for base level purity. Purity level is typically needed by semiconductor devices with geometries of 0.8 - 1.2 microns.
| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
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| SupersededBy |
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