SEMI C11-5 : 1994
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
GUIDELINE FOR SULFURIC ACID, VLSI GRADE
01-03-2001
12-01-2013
Reflects a chemical purity level between the currently published specification SEMI C1.16 for base level purity and the Guideline Tier A SEMI C7.8. Purity level is typically needed by semiconductor devices with geometries of 0.8 - 1.2 microns.
| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
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