SEMI C11-7 : 1998
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
GUIDELINE FOR 2-PROPANOL, VLSI GRADE
01-03-2003
12-01-2013
Reflects a chemical purity level between the currently published specification SEMI C1.15 for base level purity and the Guideline Tier A, SEMI C7.7. Purity level is typically needed by semiconductor devices with geometries of 0.8 - 1.2 micrometers.
| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
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