SEMI C12-3 : 1996
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
GUIDELINE FOR 4.9% HYDROFLUORIC ACID (10:1 V/V), TIER C
01-03-2001
12-01-2013
Intended to establish the general procedures, specifications, definitions, and analytical procedures for 4.9% hydrofluoric acid (10:1 v/v), Tier C. Products within all of the requirements can be described as "meeting SEMI specifications." Where analytical procedure differs from that provided and is substituted by a user or supplier, the burden of proof is on said user or supplier to confirm the equivalency.
| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
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