SEMI C18:2014(R2020)
Current
Current
The latest, up-to-date edition.
Specification for Acetic Acid
Available format(s)
Hardcopy
Language(s)
English
Published date
01-06-2020
The purpose of this Document is to standardize requirements for acetic acid used in the semiconductor industry and testing procedures to support those specifications.
DocumentType |
Test Method
|
Pages |
0
|
PublisherName |
Semiconductor Equipment & Materials Institute
|
Status |
Current
|
Supersedes |
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