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SEMI C18:2014(R2020)

Current

Current

The latest, up-to-date edition.

Specification for Acetic Acid

Available format(s)

Hardcopy

Language(s)

English

Published date

01-06-2020

€134.60
Excluding VAT

The purpose of this Document is to standardize requirements for acetic acid used in the semiconductor industry and testing procedures to support those specifications.

DocumentType
Test Method
Pages
0
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

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