SEMI C2 : 1995
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
SPECIFICATIONS FOR ETCHANTS
01-03-2008
12-01-2013
The SEMI Committee on Chemical Reagents began its efforts on etchants in 1979. In this publication, the Committee establishes definitions for three major types of etchant mixtures; buffer oxide etchants, mixed acid etchants, and phosphoric etchants. Analytical procedures and specifications are introduced for each type. Etchants within all of the requirements can be described as "meeting SEMI specifications." Where analytical procedure differs from that given and is substituted by a user or supplier the burden of proof is on said user or supplier to confirm the equivalency.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Withdrawn
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| SEMI C37 : 2006(R2011) | SPECIFICATION FOR PHOSPHORIC ETCHANTS |
| SEMI C34 : 2013(R 2019) | SPECIFICATION AND GUIDELINE FOR MIXED ACID ETCHANTS |
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