SEMI C2-3 : 1995
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
STANDARD FOR PHOSPHORIC ETCHANTS
01-06-1999
12-01-2013
Specific to Phosphoric Etchants. In this publication, the Committee establishes definitions for three major types of etchant mixtures; buffer oxide etchants, mixed acid etchants, and phosphoric etchants. Analytical procedures and specifications are introduced for each type. Etchants within all of the requirements can be described as "meeting SEMI specifications." Where analytical procedure differs from that provided and is substituted by a user or supplier, the burden of proof is on said user or supplier to confirm equivalency.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (02/2005)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
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