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SEMI C20 : 2013 (R2018)

Current

Current

The latest, up-to-date edition.

SPECIFICATION AND GUIDE FOR AMMONIUM FLUORIDE 40%

Published date

12-01-2013

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Specifies requirements for ammonium fluoride 40% used in the semiconductor industry and testing procedures to support those standards.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Supersedes SEMI C1-3, SEMI C11-2 & SEMI C7.18. (03/2005)
DocumentType
Technical Specification
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

SEMI C1 : 2010 GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS

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