SEMI C21 : 2008
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATIONS AND GUIDELINE FOR AMMONIUM HYDROXIDE
Superseded date
06-11-2018
Superseded by
Published date
12-01-2013
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Standardizes requirements for ammonium hydroxide used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Supersedes SEMI C1-4, SEMI C11-1, SEMI C17.1, SEMI C7.1 & SEMI C8-1. (03/2005) Also available in CD-ROM. (06/2008)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy | |
| Supersedes |
| SEMI M51 : 2012 | TEST METHOD FOR CHARACTERIZING SILICON WAFER BY GATE OXIDE INTEGRITY |
| SEMI C1 : 2010 | GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS |
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