SEMI C23:2014(R2020)
Current
Current
The latest, up-to-date edition.
Specifications for Buffered Oxide Etchants
Available format(s)
Hardcopy
Language(s)
English
Published date
01-06-2020
Important note : Users cannot be edited or removed once added to your Multi user PDF.The purpose of this Document is to standardize requirements for buffered oxide etchants used in the semiconductor industry and testing procedures to support those standards.
| DocumentType |
Test Method
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| Pages |
0
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| Supersedes |
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