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SEMI C24 : 2013

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR N-BUTYL ACETATE

Published date

12-01-2013

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Specifies requirements for n-butyl acetate used in the semiconductor industry and to document testing procedures to support those specifications.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Supersedes SEMI C1-5. (03/2005)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

SEMI C1 : 2010 GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS

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