Name: SEMI C25 : 2012
Brand: SEMI

SPECIFICATION FOR DICHLOROMETHANE (METHYLENE CHLORIDE)

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Provides the requirements for dichloromethane (methylene chloride) used in the semiconductor industry and testing procedures to support those standards.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (02/2005) Supersedes SEMI C1-6. (03/2005)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current
Supersedes	SEMI C1-6 : 1996

SEMI C1 : 2010

GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS

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SEMI C25 : 2012

SPECIFICATION FOR DICHLOROMETHANE (METHYLENE CHLORIDE)

Abstract

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