SEMI C26 : 2012
Current
Current
The latest, up-to-date edition.
SPECIFICATION AND GUIDE FOR HEXAMETHYLDISILAZANE (HMDS)
Published date
12-01-2013
Sorry this product is not available in your region.
Improves requirements for hexamethyldisilazane used in the semi-conductor industry and testing procedures to support those standards.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (02/2005) Supersedes SEMI C1.23 & SEMI C7.10. (03/2005)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
| SEMI C1 : 2010 | GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS |
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