SEMI C27 : 2018
Current
Current
The latest, up-to-date edition.
SPECIFICATIONS AND GUIDELINES FOR HYDROCHLORIC ACID
Published date
12-01-2013
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Pertains to standardize requirements for grades of hydrochloric acid used in the semiconductor industry and testing procedures to support those specifications.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Supersedes SEMI C1-7, SEMI C11-6, SEMI C12-2, SEMI C7.2 & SEMI C8-2. (03/2005)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI C44 : 2014 | SPECIFICATIONS AND GUIDELINES FOR SULFURIC ACID |
| SEMI C1 : 2010 | GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS |
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